Sensitivity Enhanced Touch-mode Capacitive Pressure Sensor with Double-cavity

Abstract Capacitive pressure sensors that consume less power with temperature sensitivity have undergone many design modifications, in order to improve the performance for meeting application needs of various fields. In this paper, micro-pressure capacitive sensor is improved by adding a novel double-cavity structure and gas hole. The feature can amplify amplitude upper diaphragm, hole alleviate repulsive effect chamber on diaphragm bending deflection. This paper provides an in-depth theoretical analysis model designed using Finite Element Method Simulations. simulated results indicate significant enhancement linearity range capacitance comparison traditional structure. Besides, shows enhanced about 1.83 times when volume ratio cavity lower 4:1, compared having two cavities same volume. It expected realize detection technology, which integrates characteristics high sensitivity, large range, anti-overload technology.